Substrate processing system managing apparatus information of substrate processing apparatus

ABSTRACT

A substrate processing system comprises a substrate processing apparatus and a support computer, which are connected to a network respectively. Updated countermeasure information is accumulated in the support computer by a system administrator. When the substrate processing apparatus causes a failure, content of the failure is displayed on a display part while an alarm processing part controls process according to an alarm definition file. Further, a countermeasure information acquisition part requires updated countermeasure information against the failure from the support computer. In response to this, countermeasure information distribution part of the support computer transmits updated countermeasure information. Thus, updated countermeasure information can be read instantly when a failure occurs.

CROSS REFERENCE TO RELATED APPLICATION

This application is a divisional of U.S. application Ser. No. 10/189,975filed Jul. 2, 2002 now U.S. Pat. No. 7,047,100 entitled SUBSTRATEPROCESSING SYSTEM MANAGING APPARATUS INFORMATION OF SUBSTRATE PROCESSINGAPPARATUS, which claims the benefit of Japanese Appln. S.N. P2001-205109filed Jul. 1, 2001, Japanese Appln. S.N. P2001-205110 filed Jul. 1, 2001and Japanese Appln. S.N. P2001-205111 filed Jul. 1, 2001, the contentsof which are incorporated by this reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a network communication techniqueconnecting a substrate processing apparatus performing prescribedprocessing on a semiconductor substrate, a glass substrate for a liquidcrystal display, a glass substrate for a photomask or a substrate for anoptical disk (hereinafter simply referred to as “substrate”) and acomputer with each other through a network.

2. Description of the Background Art

A product such as a semiconductor device or a liquid crystal display ismanufactured by performing a series of processing such as cleaning,resist application, exposure, development, etching, formation of aninterlayer dielectric film and heat treatment on a substrate. Ingeneral, a substrate processing apparatus having a built-in resistcoating unit, a built-in developing unit etc. performs such processing.A transport robot provided on the substrate processing apparatussuccessively transports a substrate to the respective units, therebyperforming the series of processing on the substrate.

Such substrate processing is automatically controlled, and the substrateprocessing apparatus generally comprises a unit control partindividually controlling the processing units in addition to a systemcontrol part controlling the overall apparatus. Control software mountedon the substrate processing apparatus is formed by software modulesinstalled in the system control part and the unit control partrespectively. In other words, the software module installed in thesystem control part constructs a system controller controlling theoverall apparatus, and the software modules installed in the unitcontrol part construct a unit controller individually controlling therespective processing units.

Each of the software modules installed in the system control part andthe unit control part has a specific version. Each software module isintentionally subjected to version upgrades or modifications. Theversion of a specific software module may be temporarily revised for theconvenience of support in a factory having the substrate processingapparatus.

When revising the version of such a software module, it is important tokeep matching properties between all software modules installed in thesubstrate processing apparatus. If no matching properties are keptbetween the software module, the substrate processing apparatus maymalfunction or stop due to trouble in the controller. Therefore, anysoftware module is intentionally subjected to version upgrades whilekeeping matching properties between the software modules.

In this case, however, a software module of a false version may beinstalled due to erroneous operation. When the version of a specificsoftware module is temporarily revised on the support site, thestructure of the software module may differ from the intended modulestructure. In this case, matching properties between the softwaremodules may not necessarily be kept, resulting in a failure of theapparatus such as a malfunction or stoppage.

When the substrate processing apparatus causes a failure, anunexpectedly long time may be required for analyzing the cause of thefailure unless version information of the software modules mounted onthe apparatus is quickly and correctly grasped.

The aforementioned substrate processing apparatus regularly sequentiallyrecords various types of information as to operation such as informationon substrate processing steps and operational information for anoperator as log files.

These log files are recorded every time a predetermined event takesplace along with the time of the event, to indicate time-seriesoperation information as to operation of the substrate processingapparatus. Therefore, information on past operation of the substrateprocessing apparatus can be confirmed post hoc by referring to thecontents recorded in the log files. Particularly when the substrateprocessing apparatus causes a failure, the cause of the failure can beanalyzed by referring to the contents recorded in the log files recordedin advance of the failure.

In general, the following procedure is employed in order to deal with afailure taking place the substrate processing apparatus:

1. The operator recognizes the occurrence of the failure through a towerlamp or a buzzer of the substrate processing apparatus.

2. The operator posts the occurrence of the failure to a field serviceengineer of a vendor.

3. The field service engineer goes to the substrate processing factoryhaving the substrate processing apparatus and grasps the situation ofthe failure.

4. If the field service engineer cannot deal with the failure ad loc.,he/she acquires the log files of the substrate processing apparatus byoutputting the same to a recording medium and creates a failure reportdocument indicating the specific situation of the failure.

5. The field service engineer transmits the aforementioned log files andthe failure report document to a failure analyst at a remote place suchas a support center through an electronic mail or the like.

6. The failure analyst refers to the log files and the failure reportdocument, to analyze the cause of the failure and study a countermeasureagainst the failure.

7. The failure analyst posts the results of the failure analysis and thecountermeasure to the field service engineer.

Thus, also when a failure takes place, it is possible to analyze thecause of the failure by referring to the log files, for taking a propercountermeasure against the failure.

However, a considerable time is required for operation other than theanalysis (6) of the cause of the failure through the log files in theaforementioned procedure, leading to requirement for a long time forcompleting the analysis and posting the countermeasure to the fieldservice engineer. Particularly when a significant failure takes place,the substrate processing apparatus must be stopped over a long timeuntil the countermeasure is posted to the field service engineer,disadvantageously leading to remarkable reduction of the productionefficiency for substrates.

A long time is also required for acquiring the log files following theoccurrence of the failure. The maximum data quantity of the log files ispreviously set and hence the recorded contents necessary for analyzingthe failure may have already been deleted when the log files areacquired. When rendering the log files preservable over a long period inorder to deal with this, the data quantity of the log files acquiredupon occurrence of the failure is remarkably increased, leading to along time required for transmitting the log files to the failure analystand retrieving the necessary recorded contents.

A substrate processing apparatus having a built-in resist coating unit,a built-in developing unit or the like may previously storecountermeasure information against failures assumed therein. Thiscountermeasure information includes the causes of failures, operationmethods corresponding to the failures and constraints related to thefailures. Thus, even an operator having insufficient knowledge of thisapparatus can restore the apparatus from any failure by properly readingthe aforementioned countermeasure information following the occurrenceof the failure.

However, the substrate processing apparatus stores the countermeasureinformation as of the date of introduction (shipment) of the apparatus.When an unexpected failure not assumed at the time of introduction orthe like takes place, therefore, it may be impossible to properly dealwith the failure through the stored countermeasure information. If theapparatus is restored from the failure according to impropercountermeasure information, the state of the substrate processingapparatus may be further deteriorated to retard the restoration.

In order to deal with this, the vendor distributes latest countermeasureinformation newly recognized with reference to failures as additionalinformation through documents or the like. However, this additionalinformation, distributed by mail or the like, cannot be immediatelyacquired when the latest countermeasure information is necessary.

Further, it follows that the distributed latest countermeasureinformation is managed independently of the countermeasure informationstored in the apparatus and hence the information cannot be unified.Thus, it is difficult to select the latest countermeasure informationnecessary when a failure occurs in practice.

SUMMARY OF THE INVENTION

The present invention is directed to a substrate processing systemconnecting a substrate processing apparatus and a computer with eachother to be capable of making communication through a network.

A substrate processing system according to an aspect of the presentinvention, having a substrate processing apparatus and a computerprocessing apparatus information of the substrate processing apparatusconnected to a network, comprises an apparatus information storageelement storing the acquired apparatus information and an apparatusinformation uncasing element rendering the apparatus information storedin the apparatus information storage element readable from the computerthrough the network.

The apparatus information of the regularly operating substrateprocessing apparatus can be read through the network in the storedstate, whereby the apparatus information can be readily grasped from aremote place.

According to another aspect of the present invention, a substrateprocessing system comprising a substrate processing apparatus comprisinga processing unit performing prescribed processing on a substrate, asystem control part controlling overall the apparatus and a unit controlpart individually controlling the processing unit, a computer connectedwith the substrate processing apparatus through a network and a matchingproperty confirmation element confirming the matching properties ofsoftware modules presently installed in the system control part and theunit control part respectively when a software module is installed inthe system control part or the unit control part.

A failure resulting from mismatching between software modules installedin the substrate processing apparatus can be prevented.

According to still another aspect of the present invention, a substrateprocessing system comprising a substrate processing apparatus capable ofmaking communication through a network, comprises an additionalinformation storage element storing additional information, relevant tothe substrate processing apparatus, additionally distributed by a vendorof the substrate processing apparatus, and an additional informationacquisition element acquiring stored the additional information throughthe network.

The additional information additionally distributed by the vendor of thesubstrate processing apparatus can be immediately acquired.

The present invention is also directed to a substrate processing methodconnecting a substrate processing apparatus and a computer with eachother to be capable of making communication through a network.

The present invention is further directed to a substrate processingapparatus connected with a computer to be capable of makingcommunication through a network.

Accordingly, an object of the present invention is to make operationinformation of a substrate processing apparatus immediately readablefrom a remote place.

Another object of the present invention is to prevent a failureresulting from mismatching between software modules installed in asubstrate processing apparatus.

Still another object of the present invention is to make additionalinformation immediately acquirable whenever the same is necessary.

The foregoing and other objects, features, aspects and advantages of thepresent invention will become more apparent from the following detaileddescription of the present invention when taken in conjunction with theaccompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 schematically illustrates the structure of a substrate processingsystem according to the present invention;

FIG. 2 is a schematic plan view of a substrate processing apparatus;

FIG. 3 is a block diagram showing the structure of a control system forthe substrate processing apparatus;

FIG. 4 illustrates the basic structures of an information storage serverand a support computer;

FIG. 5 is a block diagram showing an exemplary functional structure of asubstrate processing system according to a first embodiment of thepresent invention;

FIG. 6 illustrates an exemplary alarm definition file;

FIG. 7 illustrates an exemplary failure information database;

FIG. 8 illustrates the flow of processing in the substrate processingsystem upon occurrence of a failure;

FIG. 9 illustrates an exemplary countermeasure information database;

FIG. 10 is a block diagram showing another exemplary functionalstructure of the substrate processing system according to the firstembodiment;

FIG. 11 is a block diagram showing an exemplary functional structure ofa substrate processing system according to a second embodiment of thepresent invention;

FIG. 12 illustrates an exemplary alarm definition file in the secondembodiment;

FIG. 13 illustrates the flow of processing in the substrate processingsystem according to the second embodiment;

FIG. 14 illustrates an exemplary functional structure of a substrateprocessing system according to a third embodiment of the presentinvention;

FIG. 15 illustrates the flow of processing in the substrate processingsystem according to the third embodiment;

FIG. 16 illustrates an exemplary version management table;

FIG. 17 illustrates an exemplary confirmation table;

FIG. 18 illustrates another exemplary version management table;

FIG. 19 illustrates another exemplary functional structure of thesubstrate processing system according to the third embodiment; and

FIG. 20 illustrates still another exemplary functional structure of thesubstrate processing system according to the third embodiment.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Embodiments of the present invention are now described with reference tothe drawings.

1. First Embodiment

FIG. 1 schematically illustrates the structure of a substrate processingsystem 10 according to a first embodiment of the present invention. Asshown in FIG. 1, the substrate processing system 10 is mainly formed byconnecting substrate processing apparatuses 1 and an information storageserver 2 provided on a substrate processing factory 4 and supportcomputers 3 provided on a support center 5 having failure analystsanalyzing failures of the substrate processing apparatuses 1 with eachother through a network 6.

In the substrate processing system 10, the information storage server 2stores apparatus information including log files and failure informationof the substrate processing apparatuses 1, so that the stored apparatusinformation is readable in the support computers 3 through the network6.

In the substrate processing factory 4, the substrate processingapparatuses 1 and the information storage server 2 are connected witheach other through a LAN (local area network) 41. The LAN 41 isconnected to a wide area network 61 such as the Internet through aconnector 42 having the functions of a router and a firewall. Thesupport center 5 also has a LAN 51 connected with the support computers3, and this LAN 51 is also connected to the wide area network 61 througha connector 52 having the functions of a router and a firewall. Thus,the substrate processing apparatuses 1, the information storage server 2and the support computers 3 can make data communication with each other.Throughout this specification, the LANs 41 and 51 and the wide areanetwork 61 are generically referred to as the network 6.

Referring to FIG. 1, the plurality of substrate processing apparatuses 1provided on the substrate processing factory 4 may alternatively bereplaced with a single substrate processing apparatus 1, and theplurality of support computers 3 provided on the support center 5 mayalso be replaced with a single support computer 3. While FIG. 1illustrates only one substrate processing factory 4, the substrateprocessing system 10 may alternatively include a plurality of substrateprocessing factories.

Each substrate processing apparatus 1 arranged on the substrateprocessing factory 4 is now described. FIG. 2 is a schematic plan viewof the substrate processing apparatus 1. This substrate processingapparatus 1 performs resist coating, development and subsequent heattreatment on substrates. The substrate processing apparatus 1 comprisesan indexer ID delivering unprocessed substrates from a carrier whilereceiving processed substrates and storing the same in the carrier,coating units (the so-called spin coaters) SC dripping photoresist onmain surfaces of substrates while rotating the substrates for coatingthe resist thereto, developing units (the so-called spin developers) SDsupplying a developer to exposed substrates thereby developing the sameand a transfer robot TR transferring the substrates between the indexerID and the units SC and SD. Heat treatment units (not shown) arearranged above the coating units SC and the developing units SD througha fan filter unit. A heating unit (the so-called hot plate) for heatingthe substrates and a cooling unit (the so-called cool plate) for coolingthe heated substrates to a constant temperature are provided as the heattreatment units. Throughout the specification, the coating units SC, thedeveloping units SD and the heat treatment units are genericallyreferred to as a processing unit 110 performing prescribed processing onthe substrates.

FIG. 3 is a block diagram showing the structure of a control system forthe substrate processing apparatus 1. As shown in FIG. 3, the substrateprocessing apparatus 1 mainly comprises a system control part 100controlling the overall apparatus 1 and a plurality of processing units110.

The system control part 100 unitedly controlling the overall apparatus 1comprises a microcomputer. More specifically, the system control part100 comprises a CPU 101 forming the main frame, a ROM 102 storingcontrol programs etc., a RAM 103 serving as a working area foroperation, a storage part 104 consisting of a hard disk or the likestoring log files etc. and a communication part 105 making datacommunication with an external device, which are connected with eachother through a bus line 190.

The communication part 105 is connected to the network 6 through anetwork interface (not shown), so that the substrate processingapparatus 1 can transmit/receive various data to/from the informationstorage server 2, each support computer 3 etc. While the communicationpart 105 may make either radio communication or wireless communicationthrough the network 6, this embodiment employs a radio communicationsystem.

In addition to the plurality of processing units 110, a display part 130displaying various information, an operation part 140 accepting input ofinformation by the operator and operation, a reader 150 reading variousdata from a recording medium 91 such as a magnetic disk or amagneto-optical disk are also electrically connected to the bus line190. Thus, data can be transferred between the respective parts of thesubstrate processing apparatus 1 through the bus line 190 under controlof the system control part 100.

The processing unit 110 also comprises unit control parts 115 along withsubstrate processing parts 116 defining working parts (includingmechanisms rotating the substrates, mechanisms discharging a processingsolution toward the substrates, mechanisms heating the substrates etc.,for example) processing the substrates in practice. Each unit controlpart 115 controls and monitors operation of each substrate processingpart 116. In other words, the aforementioned system control part 100unitedly controls the overall substrate processing apparatus 1, whileeach unit control part 115 takes charge of control responsive to thecontents of processing in each substrate processing part 116. The unitcontrol part 115 comprises a microcomputer similarly to the systemcontrol part 100. More specifically, the unit control part 115 comprisesa CPU 111 forming the main frame, a ROM 112 storing control programsetc., a RAM 113 serving as a working area of operation and a storagepart 114 consisting of an SRAM or the like backed up with a battery forstoring various data.

The ROM 102 and the storage part 104 of the system control part 100previously store system control programs. When the CPU 101 of the systemcontrol part 100 executes arithmetic operation according to any systemcontrol program, it follows that the substrate processing apparatus 1implements operation control or data processing as a whole. The ROM 112and the storage part 114 of the unit control part 115 previously storeunit control programs responsive to the contents of processing of thesubstrate processing part 116 of the processing unit 110. When the CPU111 executes arithmetic operation according to any unit control program,it follows that the substrate processing part 116 implements operationcontrol or data processing. Functions implemented by the arithmeticoperation of the system control part 100 and the unit control part 115according to these programs are described later.

These programs can be acquired and updated through reading from therecording medium 91 through the reader 150 or downloading from aprescribed server or the like through the network 6. Each of theprograms has a version, and version information as to a numerical valuefor identifying the version or the like is updated when the program isupdated. The storage part 104 of the system control part 100 stores theversion information of each program run in the substrate processingapparatus 1.

The information storage server 2 and each support computer 3 are similarin hardware structure to a general computer. Therefore, each of theinformation storage server 2 and the support computer 3, which aresimilar in basic structure to each other, is described in common withreference to FIG. 4. As shown in FIG. 4, each of the information storageserver 2 and the support computer 3 is formed by connecting a CPU 21(belonging to the information storage server 2; this also applies to thefollowing description) or 31 (belonging to the support computer 3; thisalso applies to the following description) executing arithmeticoperation, a ROM 22 or 32 storing a basic program and a RAM 23 or 33storing various information to a bus line. A hard disk 24 or 34 storingvarious information, a display 25 or 35 displaying various information,a keyboard 26 a or 36 a and a mouse 26 b or 36 b accepting input fromthe operator, a reader 27 or 37 reading various data from the recordingmedium 91 such as an optical disk, a magnetic disk or a magneto-opticaldisk and a communication part 28 or 38 making communication with theexternal device through the network 6 are properly connected to the busline for each of the information storage server 2 and the supportcomputer 3 through an interface (I/F) or the like.

Each of the information storage server 2 and the support computer 3 canread any program from the recording medium 91 through the reader 27 or37 and store the same in the hard disk 24 or 34. Each of the informationstorage server 2 and the support computer 3 can also download data fromthe prescribed server through the network 6 and store the same in thehard disk 24 or 34. The CPU 21 or 31 executes arithmetic operationaccording to the program stored in the hard disk 24 or 34, forperforming desired operation. In other words, it follows that theinformation storage server 2 carries out operation as the informationstorage server 2 and the support computer 3 carries out operation as thesupport computer 3 as a result of executing arithmetic operationaccording to the program.

FIG. 5 is a block diagram schematically showing the functional structureof the substrate processing system 10 including functions implemented byarithmetic operation of the CPU 21 or 31 according to the program ineach of the information storage server 2 and the support computer 3.

In the structure shown in FIG. 5 with reference to the substrateprocessing apparatus 1, an alarming part 117 is a function implementedby the unit control part 115 performing arithmetic operation accordingto a program. A log recording part 121, an alarm processing part 122 anda failure information generation part 123 are functions implemented bythe system control part 100 performing arithmetic operation according toprograms.

The alarming part 117 gives an alarm as a warning signal when somefailure takes place in the processing unit 110. Identification codes arepreviously assigned to various alarms, so that the alarming part 117gives an alarm having an identification code corresponding to thefailure and transmits the same to the system control part 100.

The log recording part 121 records information as to operation of theprocessing unit 110 in the storage part 104 as log files 162. Every timea predetermined event related to the operation takes place, the logfiles 162 record the time and the contents of the event. The log files162 are operation information indicating time-series information as tothe operation of the substrate processing apparatus 1, and define one ofapparatus information for analyzing the cause of the failure uponoccurrence of the failure.

The log files 162 include a plurality of types of logs such as asubstrate position log, a process log, an alarm log, an operation logand a communication log, which are classified by the log recording part121 in response to the event and recorded as individual filesrespectively. Identification codes are previously assigned to therespective log files 162.

The substrate position log is a log file 162 indicating time-seriesinformation of the position of a processed substrate in the substrateprocessing apparatus 1. More specifically, the substrate position logindicates identification information for the processing unit 110receiving the substrate, for example. The log recording part 121 recordssuch a substrate position log every time the transport robot TRtransports a substrate. Each substrate processed in the substrateprocessing apparatus 1 is supplied with an ID code and the substrateposition log is recorded along with the ID code, so that it is possibleto confirm when and which substrate has been transferred to whichposition post hoc by specifying the substrate.

The process log is a log file 162 indicating time-series information onprocessing steps such as the contents, conditions etc. of the processingactually performed in each processing unit 110. More specifically, theprocess log indicates the heating temperature and the heating time inthe heating unit, the quantity and the concentration of the resistcoated in the coating unit SC etc., for example. It follows that theprocess log is transmitted to the log recording part 121 from the unitcontrol part 115 of each processing unit 110 and recorded therein everytime a substrate is processed. The process log is also recorded alongwith the ID code of the substrate, so that it is possible to confirmwhich substrate has been processed when in which processing unit 110under which processing conditions post hoc by specifying the substrate.When a substrate gets some flaw in the process therefor, the defect ofthe substrate is generally not detected unless the process progresses tosome extent. According to this embodiment, however, it is possible tograsp the flaw on the process seemingly causing the defect post hoc byconfirming the process log. When reliably preserving this process logupon occurrence of a failure, the analysis of the cause of the failureis simplified.

The alarm log is a log file 162 indicating time-series information ofthe given alarm. More specifically, the alarm log indicates theidentification information on the processing unit 110 giving the alarm,an identification code of the alarm etc. The log recording part 121records the alarm log every time the same is given. It is possible toconfirm when and which alarm has been given in what processing unit 110post hoc through the alarm log.

The operation log is a log file 162 indicating time-series informationof the contents of operation of the operation part 140 performed by theoperator. More specifically, the operation log indicates a startinstruction or a processing condition changing instruction for thesubstrate processing apparatus 1. The log recording part 121 records theoperation log every time the operator performs operation. It is possibleto confirm when and which operation has been performed post hoc throughthe operation log.

The communication log is a log file 162 indicating time-seriesinformation of communication between the substrate processing apparatus1 and the external device such as the information storage server 2through the communication part 105. More specifically, the communicationlog indicates the contents of information transmitted to the informationstorage server 2 or the like. The log recording part 121 records thecommunication log every time the communication part 5 makescommunication. It is possible to confirm when and what kind ofcommunication has been made post hoc through the communication log.

The alarm processing part 122 receives the alarm from the alarming part117 for performing operation control in response to the identificationcode of this alarm. The alarm processing part 122 performs this prosingby referring to an alarm definition file 161 previously stored in thestorage part 104. The alarm definition file 161 is stored as anindependent file every category (each coating unit SC, each developingunit SD or the like) of the processing unit 110, so that the alarmprocessing part 122 selects and refers to the proper alarm definitionfile 161 in response to the processing unit 110 giving the alarm.

FIG. 6 illustrates an exemplary alarm definition file 161. As shown inFIG. 6, the alarm definition file 161 is a table having a plurality offields including “alarm code”, “display text”, “system control code”,“output log file code” etc.

The “alarm code” is a field indicating the identification code includedin the given alarm. The remaining fields (“display text”, “systemcontrol code”, “output log file code” etc.) are associated with this“alarm code”. It follows that the alarm processing part 122 retrievesthe identification code of the received alarm from the “alarm code” andperforms processing according to the contents described in the remainingcodes corresponding to this identification code.

The “display text” is a field indicating the specific contents of thefailure as a text. The alarm processing part 122 makes the display part130 display the contents indicated in this “display text”. Thus, theoperator can grasp what kind of failure has been caused as a specifictext.

The “system control code” is a field indicating the contents of controlof the substrate processing apparatus 1 at the time of occurrence of thealarm. More specifically, control contents are previously assigned tothe “system control code” so that the operation of the substrateprocessing apparatus 1 is stopped if the “system control code” is “1”and the substrate processing apparatus 1 is forcibly restarted if the“system control code” is “2”. The alarm processing part 122 performsoperation control according to the contents described in the “systemcontrol code”, and hence it follows that the substrate processingapparatus 1 performs proper operation in response to the type of thefailure.

The “output log file code” is a field indicating the identificationcodes of the log files 162 relevant to the cause of the alarm. In otherwords, the output log file code selectively describes only theidentification codes of the log files 162 necessary for grasping thecause of the failure. Thus, the alarm processing part 122 can readilyselect and extract only the log files 162 (e.g., only the process logand the operation log) relevant to the cause of the alarm. The log files162, relevant to the cause of the alarm, extracted by the alarmprocessing part 122 are hereinafter also referred to as relevant logfiles 262.

The alarm processing part 122 transmits the relevant log files 262 tothe information storage server 2 through the LAN 41. The hard disk 24 ofthe information storage server 2 stores the transmitted relevant logfiles 262. The alarm processing part 122 instructs the failureinformation generation part 123 to generate failure information.

The failure information generation part 123 receiving the instructionfrom the alarm processing part 122 generates failure information as tothe occurring failure. In other words, the failure informationgeneration part 123 serves as means generating failure information whenthe alarm is given.

The failure information, one of the apparatus information for specifyingthe cause of the failure along with the relevant log files 262,comprises items such as “date”, “apparatus”, “unit”, “version”,“contents of failure” and “log”.

The “date” indicating the date of alarming is acquired from a prescribedtimer circuit in generation of the failure information.

The “apparatus” is identification information of the faulty substrateprocessing apparatus 1 itself. The identification information,previously assigned to each of the substrate processing apparatuses 1arranged on the substrate processing factory 4, is stored in the storagepart 104.

The “unit” is identification information of the faulty processing unit110. This indicates the processing unit 110 transmitting the alarm.

The “version” is version information of a unit control program in thefaulty processing unit 110. The failure may occur only in a specificversion of the program, and hence it may be possible to specify thecause of the failure through the version information.

The “contents of failure”, indicating the contents of the “display text”of the aforementioned alarm definition file 161, are acquired from thealarm processing part 122.

The “log”, which is a retention path of each relevant log file 262 inthe information storage server 2, is acquired from the alarm processingpart 122. It follows that the failure information and each relevant logfile 262 are associated with each other through this item.

Thus, the failure information is formed by information enabling theoperator or the failure analyst to specifically and readily grasp thecontents of the occurring failure. The failure information generationpart 123 transmits the generated failure information to the informationstorage server 2 through the LAN 41.

The information storage server 2 stores the apparatus information ofeach substrate processing apparatus 1 arranged on the substrateprocessing factory 4. In the structure shown in FIG. 5, a failureinformation registration part 224, a mailing part 225, an apparatusinformation uncasing part 226 and a countermeasure informationregistration part 227 are functions implemented by the CPU 21 performingarithmetic operation according to programs.

When receiving the failure information from the failure informationgeneration part 123 of the substrate processing apparatus 1, the failureinformation registration part 224 additionally registers the same in afailure information database (hereinafter referred to as “failureinformation DB”) 261. Therefore, it follows that the hard disk 24 storesthe failure information as the failure information DB 261. In theadditional registration of the failure information, the failureinformation registration part 224 automatically generates anidentification number of the added failure information.

FIG. 7 illustrates an exemplary failure information DB 261. As shown inFIG. 7, the failure information DB 261 has a plurality of fields D1 toD6 storing the items “date”, “apparatus”, “unit”, “version”, “contentsof failure” and “log” of the failure information respectively. A fieldD0 stating “No.” stores the identification number of each generatedfailure information. The field D6 stating “log” stores the retentionpaths of the relevant log files 262, and hence the failure informationDB 261 is also associated with the relevant log files 262. Failureinformation is stored as the failure information DB 261 every time afailure takes place, and hence it follows that the failure informationDB 261 also shows the history of failures occurring in the past in thesubstrate processing factory 4 along with the information of the presentfailure.

The failure information registration part 224 instructs the mailing part225 to post the occurrence of the failure in the substrate processingapparatus 1 to the support computer 3 when additionally registering newfailure information in the failure information DB 261.

The mailing part 225 receiving the instruction from the failureinformation registration part 224 submits e-mail describing theoccurrence of the failure to the support computer 3. In other words, themailing part 225 serves as means posting the occurrence of the failureto the support computer 3 through the network 6 when the alarm is given.

The apparatus information uncasing or formatting or converting part 226renders the apparatus information such as the failure information DB 261and the relevant log files 262 stored in the hard disk 24 readable fromthe support computer 3. The apparatus information uncasing part 226having an HTTP server function converts the apparatus information to anHTML document and transmits the same to the network 6. The apparatusinformation uncasing part 226 transmits the apparatus information inresponse to a request for reading received from the external deviceconnected to the network 6 through a WEB browser.

The countermeasure information registration part 227 receivescountermeasure information from the support computer 3. Thecountermeasure information includes results of analysis made by thefailure analyst of the support center 5 reading the apparatusinformation of the faulty substrate processing apparatus 1 and acountermeasure against the failure etc. In other words, thecountermeasure information registration part 227 serves as meansacquiring failure countermeasure information based on the apparatusinformation. When receiving this countermeasure information, thecountermeasure information registration part 227 additionally registersthe same in a countermeasure information database (hereinafter referredto as “countermeasure information DB”) 263. Therefore, it follows thatthe hard disk 24 stores the countermeasure information as thecountermeasure information DB 263.

When the information storage server 2 performs prescribed operation, itis possible to display and confirm the contents of the aforementionedfailure information DB 261, the aforementioned relevant log files 262and the aforementioned countermeasure information DB 263 stored in thehard disk 24 on the display 25 at any time.

In the structure of the support computer 3 shown in FIG. 5, a mailreceiving part 321, a WEB browser 322 and a countermeasure informationtransmission part 323 are functions implemented by the CPU 31 performingarithmetic operation according to programs.

The mail receiving part 321 receives e-mails through the network 6. Themail receiving part 321 makes communication with a prescribed mailserver (not shown) every constant time, to automatically check e-mailsdirected to the support computer 3. It follows that the mail receivingpart 321 receives the aforementioned e-mail submitted from the mailingpart 225.

The WEB browser 322 has a function of, when an address (URL) on thenetwork 6 is specified, acquiring an HTML document or the like presenton this address. When a prescribed address is specified, the apparatusinformation stored in the information storage server 2 can be acquiredthrough the apparatus information uncasing part 226. Thus, the failureanalyst of the support center 5 can read the failure information, therelevant log files 262 etc. of the faulty substrate processing apparatus1.

The countermeasure information transmission part 323 transmits thecountermeasure information to the information storage server 2. Thefailure analyst inputs the countermeasure information in the supportcomputer 3 through prescribed operation, so that the countermeasureinformation transmission part 323 transmits the same to the informationstorage server 2.

The contents of processing in the substrate processing system 10 inrelation to the faulty substrate processing apparatus 1 are nowdescribed. FIG. 8 shows the flow of the processing of the substrateprocessing system 10. Referring to FIG. 8, the right side showsprocessing in the substrate processing apparatus 1, the center showsprocessing in the information storage server 2 and the left side showsprocessing in the support computer 3 respectively. The time elapses indescending order.

When a failure occurs in any processing unit 110 of the substrateprocessing apparatus 1, the alarming part 117 of this processing unit110 gives an alarm having an identification code corresponding to thefailure and transmits the same to the system control part 100 (stepS11).

The alarm processing part 122 receives the transmitted alarm andperforms operation control responsive to the identification code. Inother words, the alarm processing part 122 refers to the alarmdefinition file 161 and makes the display part 130 display specificcontents of the failure described in the “display text”, while stoppingoperation of the substrate processing apparatus 1 according to the“system control code” (step S12).

The alarm processing part 122 further refers to the “output log filecode” of the alarm definition file 161, extracts the relevant log files262 and transmits the same to the information storage server 2 (stepS13). The hard disk 24 stores the relevant log files 262 received in theinformation storage server 2 (step S21). Thus, it follows that only therelevant log files 262 necessary for analyzing the failure are extractedand reliably preserved. The process log, which is particularly importantfor analyzing the cause of the failure as hereinabove described, ispreferably reliably preserved as one of the relevant log files 262.

Then, the alarm processing part 122 instructs the failure informationgeneration part 123 to generate failure information while transferringthe contents of the “display text” of the alarm definition file 161 andthe retention paths of the relevant log files 262. The failureinformation generation part 123 instructed by the alarm processing part122 generates failure information (step S14) and transmits the generatedfailure information to the information storage server 2 (step S15).

The failure information registration part 224 of the information storageserver 2 receives the failure information and additionally registers thesame in the failure information DB 261 (step S22). Thus, the hard disk24 stores the failure information as to the occurring failure and therelevant log files 262 in association with each other, so that the sameare readable from the support computer 3 through the apparatusinformation uncasing part 226. Proper security such as a password ispreferably employed for the failure information DB 261 and the relevantlog files 262 to be prevented from illegal reading when transmitted tothe network 6.

The failure information registration part 224 instructs the mailing part225 to post the occurrence of the failure in the substrate processingapparatus 1 to the support computer 3. The mailing part 225 receivingthis instruction submits e-mail describing the occurrence of the failureto the mail address of the support computer 3 (step S23). The hard disk24 previously stores this mail address.

The mail receiving part 321 of the support computer 3 receives thesubmitted e-mail (step S31). Thus, the failure analyst of the supportcenter 5 recognizes the occurrence of the failure in the substrateprocessing factory 4. The aforementioned processing for submitting thee-mail following occurrence of the failure is entirely automaticallycarried out and hence the failure analyst can immediately recognize theoccurrence of the failure regardless of the time zone in spite of theremote place.

The failure analyst receiving the e-mail requests the informationstorage server 2 to allow reading of the failure information DB 261through the WEB browser 322. An address specified to the WEB browser 322at this time may be either described in the aforementioned e-mail orpreviously stored in the hard disk 34 of the support computer 3 or thelike. The apparatus information uncasing part 226 of the informationstorage server 2 receiving this request transmits the failureinformation DB 261 to the support computer 3. Thus, the display 35 ofthe support computer 3 displays the contents of the failure informationDB 261 as shown in FIG. 7.

The failure analyst can specifically and readily grasp the contents ofthe failure through the failure information defining the final data ofthe failure information DB 261. The failure analyst can further displayand read the relevant log files 262 for the failure by specifying thefield D6 describing “log” through prescribed operation (steps S32 andS24). Only the relevant log files 262 relevant to the failure havealready been extracted and hence the volume of the data is so limitedthat the data can be received at a relatively high speed.

The failure analyst analyzes the cause of the failure on the basis ofthe failure information and the relevant log files 262. Also in thisanalysis, the cause of the failure can be readily and properly estimatedsince only the relevant log files 262 relevant to the failure have beenextracted. Further, the failure analyst can also estimate the cause ofthe failure from past failure information since the history of failuresoccurring in the past can also be read.

When completely analyzing the cause of the failure, the failure analystinputs the results of analysis of the failure and the countermeasuretherefor in the support computer 3 as the countermeasure information.

The countermeasure information comprises information of items “No.”,“object apparatus”, “unit”, “analytic result”, “countermeasure”,“program schedule”, “version” etc.

The item “No.” indicates the identification number of the countermeasureinformation, which is identical to the identification number of thefailure information.

The item “object apparatus” indicates the identification information ofthe faulty substrate processing apparatus 1, which is identical to theitem “apparatus” in the failure information.

The item “unit” indicates the identification information of the faultyprocessing unit 110, which is identical to the item “unit” in thefailure information.

The item “analytic result” indicates the results analyzed on the basisof the failure information and the relevant log files 262, specificallydescribing the cause of the failure etc.

The item “countermeasure” indicates a specific countermeasure againstthe failure, describing an operation procedure of action against thefailure etc.

The item “program schedule” indicates a planned release date of a newproblem for the substrate processing apparatus 1 for avoiding occurrenceof failures. The substrate processing apparatus 1 can be prevented fromthe same failure due to an update to this new program.

The item “version” indicates version information of the aforementionednew program.

The countermeasure information transmission part 323 transmits the inputinformation to the information storage server 2 (step S33). Thecountermeasure information registration part 227 of the informationstorage server 2 receives the countermeasure information andadditionally registers the same in the countermeasure information DB 263(step S25).

FIG. 9 illustrates an exemplary countermeasure information DB 263. Asshown in FIG. 9, the countermeasure information DB 263 has a pluralityof fields D10 to D16 storing information of the items “No.”, “objectapparatus”, “unit”, “analytic result”, “countermeasure”, “programschedule” and “version” of the countermeasure information respectively.The contents of the countermeasure information DB 263 can be read in theinformation storage server 2 at any time, and hence it follows that theoperator of the substrate processing factory 4 can also properly dealwith the failure.

Thus, it is possible to automatically post the failure occurring in thesubstrate processing apparatus 1 to the failure analyst of the supportcenter 5 so that he/she can immediately refer to the failure informationand the relevant log files 262 from the remote place through the network6, whereby the time required for starting analyzing the cause of thefailure after recognizing the occurrence of the failure can beremarkably reduced.

Only the relevant log files 262 relevant to the failure are extractedand stored, whereby the log files 262 necessary for analyzing the causeof the failure can be reliably stored and preserved. Further, the volumeof the stored data is limited, whereby the data can be transmitted tothe support computer 3 at a relatively high speed, and the time forretrieving recorded contents necessary for the analysis can also bereduced.

In addition, the time for the analysis is reduced while the analyticresult and the countermeasure information can be confirmed at any time,whereby a proper countermeasure can be immediately taken against thefailure.

The first embodiment is not restricted to the above. For example, whilethe information storage server 2 is arranged in the substrate processingfactory 4, the present invention is not restricted to this but theinformation storage server 2 may alternatively be arranged at any placeso far as the same is connected to the network 6 to be capable of makingcommunication with each substrate processing apparatus 1 and eachsupport computer 3.

The substrate processing apparatus 1 may alternatively have theprocessing function of the information storage server 2. FIG. 10schematically shows another functional structure of the substrateprocessing system 10 provided with a substrate processing apparatus 1having the processing function of the information storage server 2.Elements having the same functions as those in FIG. 5 are denoted by thesame reference numerals.

In the structure shown in FIG. 10, a failure information registrationpart 124, a mailing part 125, an apparatus information uncasing part 126and a countermeasure information registration part 127 are functionsimplemented by a system control part 100 of the substrate processingapparatus 1 performing arithmetic operation according to programs.

The failure information registration part 124 corresponds to thefunction of the failure information registration part 224 of theinformation storage server 2, the mailing part 125 corresponds to thefunction of the mailing part 225 of the information storage server 2,the apparatus information uncasing part 126 corresponds to the functionof the apparatus information uncasing part 226 of the informationstorage server 2, and the countermeasure information registration part127 corresponds to the function of the countermeasure informationregistration part 227 of the information storage server 2.

According to this structure, the substrate processing apparatus 1 cantake charge of the processing carried out in the information storageserver 2 in the aforementioned embodiment, and the present invention canbe implemented with a simpler structure.

While the items “display text”, “system control code”, and “output logfile code” are associated with the “alarm code” defining the warningsignal in the alarm definition file 161 in the aforementionedembodiment, the “alarm code” may be associated with any other items sofar as at least the warning signal and relevant operation informationrelevant to the cause of the warning signal are associated with eachother.

While the information storage server 2 stores only the relevant logfiles 262 and the failure information as the apparatus information sothat the same can be read from the support computer 3 in theaforementioned embodiment, any information is employable so far as thesame is apparatus information related to the substrate processingapparatus 1.

2. Second Embodiment

The schematic structure of a substrate processing system 10 according toa second embodiment of the present invent is identical to that shown inFIG. 1. In the substrate processing system 10 according to the secondembodiment, however, a support computer 3 stores additional informationsuch as countermeasure information against a failure of a substrateprocessing apparatus 1, so that the substrate processing apparatus 1 canacquire the stored additional information through a network 6.

The substrate processing apparatus I is identical in structure to thatof the first embodiment described with reference to FIGS. 2 and 3. Thesupport computer 3 is a computer storing the additional information andproviding the additional information in response to a request from thesubstrate processing apparatus 1, and the structure thereof is identicalto that of the first embodiment described with reference to FIG. 4.

FIG. 11 is a block diagram schematically showing the functionalstructure of the substrate processing system 10 including functionsimplemented by the substrate processing apparatus 1 and the supportcomputer 3 according to the second embodiment through arithmeticoperation of CPUs or the like according to programs respectively.

As shown in FIG. 11, a storage part 104 of the substrate processingapparatus 1 previously stores countermeasure information 163 against anyfailure assumed in the substrate processing apparatus 1. Thecountermeasure information 163 describes the cause of the failure, acountermeasure against the failure, constraints on functions followingthe failure etc.

The countermeasure information 163 is prepared for each of the types ofassumed failures and stored as an individual file. This countermeasureinformation 163 is selected at need upon occurrence of a failure, sothat a display part 130 displays the contents thereof. Thecountermeasure information 163 previously stored in the substrateprocessing apparatus 1 is hereinafter also referred to as “in-apparatuscountermeasure information” 163.

A hard disk 34 of the support computer 3 also stores additionalinformation such as countermeasure information 363 against any failureof the substrate processing apparatus 1. The contents of thecountermeasure information 363 are updated every time a systemsupervisor of a support center 5 finds out new countermeasureinformation. Therefore, it follows that the countermeasure information363, also including information found out and added after introductionof the substrate processing apparatus 1, is regularly stored as thelatest countermeasure information. The countermeasure information 363stored in the support computer 3 is hereinafter also referred to as“latest countermeasure information” 363.

The substrate processing apparatus 1 can acquire the latestcountermeasure information 363 from the support computer 3 through thenetwork 6 for updating the contents of the in-apparatus countermeasureinformation 163, while the details are described later.

In the structure shown in FIG. 11, an alarming part 117 is a functionimplemented by a unit control part 115 of the substrate processingapparatus 1 performing arithmetic operation according to a program. Analarm processing part 122 and a countermeasure information acquisitionpart 128 are functions implemented by a system control part 100 of thesubstrate processing apparatus 1 performing arithmetic operationaccording to programs. A countermeasure information distribution part324 is a function implemented by a CPU 31 of the support computer 3performing arithmetic operation according to a program.

When some failure occurs in any processing unit 110, the alarming part117 gives an alarm as a warming signal indicating the occurrence of thefailure. Identification codes are previously assigned to alarms so thatthe alarming part 117 gives an alarm having an identification codecorresponding to the occurring failure and transmits the same to thesystem control part 100.

The alarm processing part 122 receives the alarm from the alarming part117 and performs operation control in response to the identificationcode of the alarm. The alarm processing part 122 performs thisprocessing by referring to an alarm definition file 461 previouslystored in the storage part 104. The alarm definition file 461 is storedas an independent file every category (each coating unit SC, eachdeveloping unit SD or the like) of the processing unit 110, so that thealarm processing part 122 selects and refers to the proper alarmdefinition file 461 in response to the processing unit 110 giving thealarm.

FIG. 12 illustrates an exemplary alarm definition file 461. As shown inFIG. 12, the alarm definition file 461 is a table having a plurality offields including items such as “alarm code”, “display text”, “systemcontrol code”, “countermeasure information”, “date of updating” etc.

The “alarm code” is a field indicating the identification code includedin the given alarm. The remaining fields (“display text”, “systemcontrol code”, “countermeasure information”, “date of updating” etc.)are associated with this “alarm code”. It follows that the alarmprocessing part 122 retrieves the identification code of the receivedalarm from the “alarm code” and performs processing according to thecontents described in the remaining fields corresponding to thisidentification code.

The “display text” is a field indicating the contents of the failure asa text. The alarm processing part 122 makes the display part 130 displaythe contents indicated in this “display text”. Thus, the operator cangrasp what kind of failure has been caused as a specific text.

The “system control code” is a field indicating the contents of controlof the substrate processing apparatus 1 at the time of alarming. Morespecifically, control contents are previously assigned to the “systemcontrol code” so that the operation of the substrate processingapparatus 1 is stopped if the “system control code” is “1” and thesubstrate processing apparatus 1 is forcibly restarted if the “systemcontrol code” is “2”. The alarm processing part 122 performs operationcontrol according to the contents described in the “system controlcode”, whereby it follows that the substrate processing apparatus 1performs proper operation in response to the type of the failure.

The “countermeasure information” is a field indicating the file name ofthe in-apparatus countermeasure information 163 corresponding to thefailure. In other words, the “alarm code” is associated within-apparatus countermeasure information 163 corresponding to the failureresulting in the alarm. When the failure takes place, therefore, thealarm processing part 122 can readily select the in-apparatuscountermeasure information 163 corresponding thereto. The alarmprocessing part 122 automatically displays the selected in-apparatuscountermeasure information 163 on the display part 130 along with theaforementioned “display text”.

The “date of updating” is a field indicating the date of updating thein-apparatus countermeasure information 163 shown in the “countermeasureinformation”. In other words, it follows that the “date of updating”indicates that the in-apparatus countermeasure information 163 describedon the “countermeasure information” has been the latest information atthe point of time of the date shown in the “date of updating”. As to afile previously stored from the time of introduction of the substrateprocessing apparatus 1 and not updated at all, the dates of shipment orintroduction of the substrate processing apparatus 1 may be eitherdescribed or not described.

The countermeasure information acquisition part 128 acquires the latestcountermeasure information 363 from the support computer 3 through thenetwork 6. In order to acquire the latest countermeasure information363, the countermeasure information acquisition part 128 transmits aprescribed request command to the support computer 3. The countermeasureinformation distribution part 324 of the support computer 3 receives therequest command transmitted from the countermeasure informationacquisition part 128. The countermeasure information distribution part324 selects the latest countermeasure information 363 on the basis ofthe received request command and transmits the same to the substrateprocessing apparatus 1.

Thus, the countermeasure information acquisition part 128 can acquirethe latest countermeasure information 363. The countermeasureinformation acquisition part 128 overwrites the corresponding file ofthe in-apparatus countermeasure information 163 with the acquired latestcountermeasure information 363. Thus, it follows that the contents ofthe in-apparatus countermeasure information 163 are updated to thelatest information.

The contents of processing in the substrate processing system 10 inrelation to the faulty substrate processing apparatus 1 are nowdescribed. FIG. 13 shows the flow of the processing of the substrateprocessing system 10 according to the second embodiment. Referring toFIG. 13, the right side shows processing in the substrate processingapparatus 1, and the left side shows processing in the support computer3 respectively. The time elapses in descending order.

When a failure occurs in any processing unit 110 of the substrateprocessing apparatus 1, the alarming part 117 of this processing unit110 gives an alarm having an identification code corresponding to thefailure and transmits the same to the system control part 100 (stepT11).

The alarm processing part 122 receives the transmitted alarm, forperforming operation control responsive to the identification code. Inother words, the alarm processing part 122 refers to the alarmdefinition file 461 and performs operation control such as stoppage ofoperation of the substrate processing apparatus 1 according to the“system control code” (step T12).

Then, the alarm processing part 122 refers to the “countermeasureinformation” of the alarm definition file 461 and selects thein-apparatus countermeasure information 163 corresponding to thefailure. The alarm processing part 122 displays the contents of theselected in-apparatus countermeasure information 163 on the display part130 along with the “display text” of the alarm definition file 461 (stepT13). Thus, the operator of the substrate processing apparatus 1 cangrasp the specific contents of the failure and a specific countermeasureagainst the failure.

The display part 130 also displays the contents of the “date ofupdating” of the alarm definition file 461. Thus, the operator can graspthe date of updating of the in-apparatus countermeasure information 163having the displayed contents, for judging reliability of the contents.In other words, the operator can judge that there is a possibility thatthe support computer 3 stores new countermeasure information if a timehas elapsed from the date of updating.

The display part 130 further displays a message for inquiring whether ornot to acquire the latest countermeasure information (step T14). Theoperator can input whether or not to acquire the latest countermeasureinformation through an operation part 140 after confirming the contentsof the in-apparatus countermeasure information 163 and the date ofupdating displayed on the display part 130. When the operator selects noacquisition at this time (NO at the step T14), the following processingof acquiring the latest countermeasure information 363 is not performedbut it follows that the operator deals with the failure only through thein-apparatus countermeasure information 163.

When the operator selects acquisition of the latest countermeasureinformation (YES at the step T14), on the other hand, the alarmprocessing part 122 instructs the countermeasure information acquisitionpart 128 to acquire the latest countermeasure information 363. Accordingto this instruction by the alarm processing part 122, the countermeasureinformation acquisition part 128 transmits a prescribed request commandto the support computer 3 in order to acquire the latest countermeasureinformation 363 (step T15). The countermeasure information distributionpart 324 of the support computer 3 receives this request command (stepT31).

Identification information of the substrate processing apparatus 1itself, identification information of the faulty processing unit 110,version information of programs stored in the substrate processingapparatus 1 and the identification code of the alarm are added to therequest command. The version information of the programs preferablyincludes version information of both of a system control program and aunit control program. The countermeasure information acquisition part128 adds the aforementioned information to the request command.

The countermeasure information distribution part 324 can select thelatest countermeasure information 363 to be transmitted in response tothe information added to the request command. The countermeasureinformation distribution part 324 transmits the selected latestcountermeasure information 363 to the substrate processing apparatus 1(step T32), and the countermeasure information acquisition part 128receives the same (step T16). According to this processing, thecountermeasure information acquisition part 128 can selectively acquireonly the latest countermeasure information 363 against the failureresulting in the alarm. At the same time, it follows that the volume ofthe data of the received latest countermeasure information 363 islimited so that the data can be received at a relatively high speed.

The countermeasure information acquisition part 128 overwrites the oldin-apparatus countermeasure information 163 (that selected at the stepT13) with the received latest countermeasure information 363 and makesthe storage part 104 store the same. The countermeasure informationacquisition part 128 also rewrites the “date of updating” of the alarmdefinition file 461 with the date of acquisition of the latestcountermeasure information 363. The countermeasure informationacquisition part 128 further rewrites the “countermeasure information”of the alarm definition file 461 with the file name of the acquiredlatest countermeasure information 363 for updating the same. Thus, itfollows that the acquired latest countermeasure information 363 is newlyassociated with the alarm and stored as the in-apparatus countermeasureinformation 163 (step T17). In other words, the storage part 104 storesthe latest countermeasure information 363 similarly to thecountermeasure information previously existing from the time ofintroduction, and the alarm definition file 461 is updated in responsethereto. Therefore, the added countermeasure information can also bemanaged as the countermeasure information against the failure in aunified manner, and treated similarly to the old countermeasureinformation.

Then, the countermeasure information acquisition part 128 posts theacquisition of the latest countermeasure information 363 to the alarmprocessing part 122, which in turn refers to the alarm definition file461 again and makes the display part 130 display the acquired latestcountermeasure information 363 (step T18). Thus, the operator can readthe latest countermeasure information, for taking a propercountermeasure against the failure.

Thus, the latest countermeasure information 363 can be immediatelyacquired from the support computer 3 storing the additional informationthrough the network 6, whereby a proper countermeasure can be taken alsowhen a failure occurs in the substrate processing apparatus 1. Further,the additional information is managed along with the previously storedcountermeasure information in a unified manner, so that the same can besimilarly treated.

The second embodiment is not restricted to the above. For example, whilethe latest countermeasure information 363 is acquired only when theoperator inquired as to whether or not to acquire the latestcountermeasure information selects acquisition in the second embodiment,the latest countermeasure information 363 may alternatively beautomatically acquired without inquiring the operator. In other words,the processing at the steps T13 and T14 shown in FIG. 13 may not becarried out. Thus, the latest countermeasure information 363 isautomatically acquired when a failure occurs in the substrate processingapparatus 1, so that the latest countermeasure information can beregularly read.

While each countermeasure information 163 is stored as an individualfile and indirectly associated with the warning signal (alarm) by thealarm definition file 461 in the aforementioned embodiment, the contentsthereof may alternatively be described in the “countermeasureinformation” field of the alarm definition file 461 or the like to bedirectly associated with the warning signal. In other words, the warningsignal and the countermeasure information against the failure resultingin this warning signal may be associated with each other.

While the identification information of the substrate processingapparatus 1, the identification information of the faulty processingunit 110, the version information of the programs and the identificationcode of the alarm are added to the request command transmitted foracquiring the latest countermeasure information 363 in theaforementioned embodiment, the present invention is not restricted tothis. It is also possible to selectively acquire proper latestcountermeasure information 363 by adding only the file name to therequest command if the file name of the countermeasure information isstructured to be capable of univocally deriving the identificationinformation of the substrate processing apparatus 1, the identificationinformation of the processing unit 110, the version information of theprograms and the identification code of the alarm, for example.

While only the countermeasure information 363 is acquired from thesupport computer 3 as the additional information in the aforementionedembodiment, any information such as information related to thespecification of the substrate processing apparatus 1, informationrelated to an operating method or information related to a substrateprocessing method is employable so far as the same is additionalinformation for the substrate processing apparatus 1.

3. Third Embodiment

The schematic structure of a substrate processing system 10 according toa third embodiment of the present invention is identical to that shownin FIG. 1. In the substrate processing system 10 according to the thirdembodiment, however, an information storage server 2 stores versioninformation of software modules mounted on a substrate processingapparatus 1, so that the stored version information can be read in asupport computer 3 through a network 6.

The structure of the substrate processing apparatus 1 is identical tothat of the first embodiment described with reference to FIGS. 2 and 3.However, a storage part 104 of a system control part 100 according tothe third embodiment stores the software module which is a systemcontrol program related to the overall apparatus 1. It follows that aCPU 101 of the system control part 100 executes arithmetic operationaccording to this software module, thereby implementing operationcontrol or data processing of the substrate processing apparatus 1 as awhole. A storage part 114 of a unit control part 115 stores a softwaremodule which is a unit control program responsive to the contents ofprocessing of a substrate processing part 116 of each processing unit110. It follows that a CPU 111 of the unit control part 115 executesarithmetic operation according to the software module, therebyimplementing operation control or data processing of the substrateprocessing part 116.

In other words, control programs mounted on the substrate processingapparatus 1 are divided into some software modules and stored in thestorage part 104 of the system control part 100 and the storage part 114of the unit control part 115, and each software module is a divided bodyof such control software for the substrate processing apparatus 1.

These software modules can be acquired and updated by reading from arecording medium 91 through a reader 150 or downloading from aprescribed server or the like through the network 6.

The structures of the information storage server 2 arranged on asubstrate processing factory 4 and the support computer 3 arranged on asupport center 5 are identical to those of the first embodimentdescribed with reference to FIG. 4.

Functions and processing contents of the substrate processing system 10are now described. FIG. 14 is a block diagram showing the functionalstructure of the substrate processing system 10 according to the thirdembodiment. FIG. 15 is a flow chart showing the procedure in thesubstrate processing system 10 according to the third embodiment.Referring to FIG. 14, a version information transmission part 129 is aprocessing part implemented by the CPU 101 of the system control part100 running a processing program (software module), a versioninformation registration part 231, a mailing part 232, a matchingproperty confirmation part 235 and an information uncasing part 236 areprocessing parts implemented by a CPU 21 of the information storageserver 2 running processing programs respectively, and a mail receivingpart 311 and a WEB browser 312 are processing parts implemented by theCPU 31 of the support computer 3 running processing programsrespectively.

First, software modules 178 are installed in the substrate processingapparatus 1 at a step S1 in FIG. 15. As hereinabove described, thesoftware modules 178 are divided bodies of the control software for thesubstrate processing apparatus 1, and installed in the system controlpart 100 and/or the unit control part 115 of the substrate processingapparatus 1. More specifically, the software modules 178 are installedthrough the reader 150 of the substrate processing apparatus 1, so thatthe storage part 104 stores the software module 178 installed in thesystem control part 100 and the storage part 114 15 stores the softwaremodule 178 installed in the unit control part 115.

Installation of the software modules 178 in this embodiment alsoincludes a case of updating the already mounted software modules 178 inaddition to a case of newly introducing the software modules 178. Thesoftware modules 178 may be simultaneously installed in all systemcontrol parts 100 and unit control parts 115 included in the substrateprocessing apparatus 1 or may be installed any (one or ones) thereof.

When the software module 178 is installed in at least either the systemcontrol part 100 or the unit control part 115, the version informationtransmission part 129 intensively transmits version information to theinformation storage server 2 (step S2). In other words, the versioninformation transmission part 129 directly recognizes the installationwhen the software module 178 is installed in the system control part100. When the software module 178 is installed in the unit control part115, on the other hand, the version information transmission part 129receiving a self-report from the unit control part 115 recognizes theinstallation. The version information transmission part 129 recognizinginstallation of the software module 178 in at least the system controlpart 100 or the unit control part 115 in a certain substrate processingapparatus 1 intensively transmits version information of softwaremodules 178 presently installed in the system control part 100 and allunit control parts 115 to the version information registration part 231of the information storage server 2.

The version information registration part 231 receiving the versioninformation registers the version information of the software modules178 installed in the system control part 100 and all unit control parts115 included in the aforementioned substrate processing apparatus 1 in ahard disk 24 (step S3). The hard disk 24 stores version information asto each substrate processing apparatus 1 as a version management table241.

FIG. 16 illustrates an exemplary version management table 241. Referringto FIG. 16, “apparatus” denotes an identification number supplied toeach substrate processing apparatus 1, “system version” denotes theversion of the overall system mounted on the substrate processingapparatus 1, and “date of installation” denotes the date of installationof the software module 178 in at least the system control part 100 orthe unit control part 115. Further, “category” denotes the type of theinstalled software module 178, “version classification” denotes whetherthe installed software module 178 is of a standard specification or acustom-built specification, and “version” denotes the versioninformation of the installed software module 178.

As shown in FIG. 16, the version management table 241 registers theversion information every substrate processing apparatus 1 arranged onthe substrate processing factory 4. As to a substrate processingapparatus 1 having an apparatus number “8101”, for example, the versionmanagement table 241 records that the software module 178 was installedon Apr. 12, 2001 as a system version “1.00”. The version managementtable 241 also records that the version of the software module 178 is“1.0.0.1” as the version information of the software module 178(category: “system control”) installed in the system control part 100 ofthe substrate processing apparatus 1 having the apparatus number “8101”.The version management table 241 further registers that the versionclassification of the software module 178 is “standard”.

As the version information of the software modules 178 (categories:“spin control”, “chemical solution control” etc.) installed in the unitcontrol part 115 of the substrate processing apparatus 1 having theapparatus number “8101”, further, the version management table 241registers that the versions of the software modules 178 are “1.1.0.1”and “1.0.0.3” respectively. The version management table 241 alsoregisters that the version classifications of the software modules 178are “standard” and “custom-built E” respectively.

Similarly as to a substrate processing apparatus 1 having an apparatusnumber “8100”, the version management table 241 records that thesoftware module 178 was installed on Apr. 12, 2001 as the system version“1.00” and thereafter another software module 178 was installed on Apr.20, 2001 as a system version “1.10”. That is, the version managementtable 241 records not only the current version information but also thepast version history every substrate processing apparatus 1. In otherwords, the hard disk 24 according to this embodiment functions asversion information storage means storing the version information of thesoftware modules 178 installed in the system control part 100 and theunit control part 115.

The version management table 241 shown in FIG. 16 is constructed as aresult of integrating the version information of the software modules178 presently installed in the system control part 100 and all unitcontrol parts 115 when any software module 178 is installed in thesubstrate processing apparatus 1. Assuming that the new software module(version: “1.0.0.3”) for chemical solution control was installed in thesubstrate processing apparatus 1 having the apparatus number “8101” onApr. 12, 2001, for example, the hard disk 24 stores the versioninformation of the software modules 178 installed in the system controlpart 100 and all unit control parts 115 included in the substrateprocessing apparatus 1 having the apparatus number “8101” at this date,to construct the version management table 241 shown in FIG. 16.

On the other hand, the version information registration part 231registers the version information of the software module 178 in the harddisk 24 while posting this registration to the mailing part 232. Themailing part 232 recognizing the registration of the version informationof the software module 178 in the hard disk 24 submits e-mail describingthis registration of the new version to the support computer 3 of thesupport center 5 through the network 6 (step S4 in FIG. 15). When themail receiving part 311 of the support computer 3 receives the e-mailrelated to the registration of the new version, the person in charge inthe support center 5 can recognize that the software module 178 has beeninstalled in the substrate processing apparatus 1 from the supportcomputer 3.

Then, the process advances to a step S5 in FIG. 15, so that the matchingproperty confirmation part 235 of the information storage server 2checks the matching property of the newly installed software module 178.More correctly, the matching property confirmation part 235 refers tothe version information of the software modules 178 installed in thesystem control part 100 and the unit control part 115 stored in the harddisk 24 when the software module 178 is installed in the system controlpart 100 or the unit control part 115 and confirms the mutual matchingproperties of the software modules 178 installed in the system controlpart 100 and the unit control part 115 respectively at that time(immediately after the installation). If the software module 178 ispartially updated, it follows that the matching property confirmationpart 235 confirms the mutual matching properties of the installedsoftware module 178 and the software modules 178 already installed inthe system control part 100 and the unit control part 115. The method ofthis confirmation is more specifically described.

When a software module 178 is installed in the system control part 100or the unit control part 115 of a certain substrate processing apparatus1, the matching property confirmation part 235 can recognize the versioninformation of the software modules 178 installed in the system controlpart 100 and the unit control part 115 respectively at that time(immediately after the installation) by referring to the versionmanagement table 241. Assuming that the new software module (version:“1.0.0.3”) for chemical solution control is installed in the unitcontrol part 115 of the substrate processing apparatus 1 having theapparatus number “8101”, for example, the matching property confirmationpart 235 can recognize that the version information of the softwaremodule 178 (category: “system control”) presently installed in thesystem control part 100 is “1.0.0.1” and the version information of thesoftware modules 178 (categories: “spin control” and “chemical control”) in the unit control part 115 is “1.1.0.1” and “1.0.0.3” respectivelyby referring to the version management table 241 shown in FIG. 16.

The hard disk 24 of the information storage server 2 stores aconfirmation table 242. FIG. 17 illustrates an exemplary confirmationtable 242. Referring to FIG. 17, the meanings of “system version”,“category”, “version classification” and “version” are identical tothose described with reference to FIG. 16. “Release information” is acomment statement as to each system version. The confirmation table 242is prepared every system version, and FIG. 17 shows the confirmationtable 242 as to the system version “1.00”.

The confirmation table 242 is a matching property confirmation tableregistering version information of software modules 178 mutually havingmatching properties, and the hard disk 24 also functions as tableholding means holding such a matching property confirmation table 242.According to the confirmation table 242 shown in FIG. 17, it isconfirmed that the software modules 178 (version: “1.1.0.1” and“1.1.0.2”) of the category “spin control” and the software module 178(version: “1.0.0.3”) of the category “chemical solution control” etc.mutually have matching properties as to the software module 178(version: “1.0.0.1”) of the category “system control” in the systemversion “1.00”. At the same time, these software modules 178 mutuallyhave matching properties also as to the software module 178 (version:“1.0.0.2”) of the category “system control”. That is, if theconfirmation table 242 registers all version information of the softwaremodules 178 installed in the system control part 100 and the unitcontrol part 115 of a certain substrate processing apparatus 1, itfollows that these software modules 178 mutually have matchingproperties.

Such a confirmation table 242, created and distributed by the maker ofthe substrate processing apparatus 1, is distributed from the supportcomputer 3 of the support center 5 to the information storage server 2of the substrate processing factory 4 through the network 6 in thisembodiment.

When a software module 178 is installed in the system control part 100or the unit control part 115 of a certain substrate processing apparatus1, the matching property confirmation part 235 confirms whether or notthe confirmation table 242 shown in FIG. 17 registers all versioninformation of the software modules 178 installed in the system controlpart 100 and the unit control part 115 recognized by referring to theversion management table 241. Consequently, the matching propertyconfirmation part 235 determines matching if the confirmation table 242registers all version information of the software modules 178 installedin the system control part 100 and the unit control part 115, whiledetermining mismatching if the confirmation table 242 does not registerany one of these (step S6 in FIG. 15).

In the aforementioned case of installing the new software module 178“version:” 1.0.0.3) for the category “chemical solution control” in theunit control part 115 of the substrate processing apparatus 1 having theapparatus number “8101”, for example, the version information of thesoftware module 178 (category: “system control”) installed in the systemcontrol part 100 of the substrate processing apparatus 1 is the version“1.0.0.1”, and the version information of the software modules 178(categories: “spin control” and “chemical solution control” or the like)installed in the unit control part 115 is the versions “1.1.0.1” and“1.0.0.3” respectively (FIG. 16). The confirmation table 242 (systemversion: “1.00”) shown in FIG. 17 registers all version information ofthese software modules 178, and hence the matching property confirmationpart 235 determines that the newly installed software module 178(category: “chemical solution control”, version: “1.0.0.3”) matches withthe software module 178 already installed in the system control part 100and the unit control part 115.

When the matching property confirmation part 235 determines matching asdescribed above, a series of processing following the installation ofthe new software module 178 is terminated. On the other hand, thematching property confirmation part 235 may determine mismatching.

For example, it is assumed that a new software module (versionclassification: “custom-built F”, version: “1.0.0.4”) of the category“chemical solution control” is installed in the unit control part 115 ofthe substrate processing apparatus 1 having the apparatus number “8101”.In this case, the hard disk 24 stores the version information of thesoftware modules 178 installed in the system control part 100 and allunit control parts 115 included in the substrate processing apparatus 1having the apparatus number “8101” at the time of the installationsimilarly to the above, for constructing a version management table 241shown in FIG. 18.

In this case, the matching property confirmation part 235 refers to theversion management table 241 shown in FIG. 18 thereby recognizing thatthe version information of the software module 178 (category: “systemcontrol”) installed in the system control part 100 is the version“1.0.0.1” and the version information of the software modules 178(categories: “spin control” and “chemical solution control” or the like)is the versions “1.1.0.1” and “1.0.0.4” respectively. The confirmationtable 242 (system version: “1.00”) shown in FIG. 17 does not registerthe version “1.0.0.4” of the software module 178 (category: “chemicalsolution control”) installed in the unit control part 115 among theversion information, and hence the matching property confirmation part235 determines that the newly installed software module 178 does notmatch with the software module 178 already installed in the systemcontrol part 100 and the unit control part 115.

When determining mismatching, the matching property confirmation part235 posts this mismatching to the mailing part 232 for submitting e-maildescribing a mismatch notice to the support computer 3 of the supportcenter 5 through the network 6 (step S7 in FIG. 15). When the mailreceiving part 311 receives the e-mail describing the mismatch notice,the person in charge of the support center 5 recognizes that thesoftware module 178 installed in the substrate processing apparatus 1 ismismatching.

In this case, the person in charge of the support center 5 confirms theversion information through the WEB browser 312 (step S8 in FIG. 15).The information uncasing part 236 uncases the version management table241 stored in the hard disk 24 of the information storage server 2 to bereadable through the network 6. The person in charge of the supportcenter 5 reads the version management table 241 stored in the hard disk24 through the WEB browser 312 and confirms the version information ofthe software module 178 installed in the substrate processing apparatus1. The person in charge of the support center 5 finds out themismatching software module 178 and posts this to the operator of thesubstrate processing factory 4 or the field service engineer throughe-mail or the like, to eliminate the mismatching.

Thus, when a software module 178 is installed in the system control part100 or the unit control par 115 of a certain substrate processingapparatus 1, the matching properties between the software modules 178presently installed in the system control part 100 and the unit controlpart 115 are so confirmed that a failure (malfunction or stoppage of thesubstrate processing apparatus 1) resulting from mismatching between thesoftware modules 178 can be prevented. If a partial software module 178is updated, it follows that matching properties between the newlyinstalled software module 178 and the software modules 178 alreadyinstalled in the system control part 100 and the unit control part 115are so confirmed that a failure resulting from mismatching between thesoftware modules 178 can be prevented.

The version management table 241 stores the version information of allsoftware modules 178 installed in the system control part 100 and theunit control parts 115 included in a substrate processing apparatus 1regardless of matching properties between the software modules 178 anduncases the same to be readable through the network 6, whereby thesupport center 5 can quickly and correctly grasp the version informationof the software modules 178 installed in the substrate processingapparatus 1 for efficiently analyzing the cause of a failure.

The third embodiment is not restricted to the above. For example, theinformation storage server 2 is arranged in the substrate processingfactory 4 in the third embodiment, while the present invention is notrestricted to this but the information storage server 2 may be arrangedon any place so far as the same is connected to the network 6 to becapable of making communication with the substrate processing apparatus1 and the support computer 3.

While the confirmation table 242 is distributed from the support compute3 and stored in the hard disk 24 of the information storage server 2 inthe third embodiment, the confirmation table 242 may alternatively bestored in the hard disk 34 of the support computer 3. FIG. 19 is afunctional block diagram showing the functional structure of a substrateprocessing system 10 storing a confirmation table 242 in a hard disk 34of a support computer 3. In this case, the maker of a substrateprocessing apparatus 1 does not distribute the created confirmationtable 242 but stores the same in the hard disk 34 of the supportcomputer 3, and uncases the same to be readable through a network 6. Amatching property confirmation part 235 of an information storage server2 checks the matching properties between the aforementioned softwaremodules 178 while referring to the confirmation table 242 through thenetwork 6. The remaining points of this structure are identical to thoseof the aforementioned embodiment. The same effect as the aforementionedembodiment can be attained also in this case.

The substrate processing apparatus 1 may alternatively have theprocessing function of the information storage server 2. FIG. 20 is afunctional block diagram showing the functional structure of a substrateprocessing system 10 provided with a substrate processing apparatus 1having the processing function of the information storage server 2.Referring to FIG. 20, parts identical in function to those in FIG. 14are denoted by the same reference numerals. Referring to FIG. 20, aversion information transmission part 129, a version informationregistration part 131, a mailing part 132, a matching propertyconfirmation part 135 and an information uncasing part 136 areprocessing parts implemented by a CPU 101 of a system control part 100running processing programs (software modules).

In the case of FIG. 20, it follows that a storage part 104 of the systemcontrol part 100 stores a version management table 241 and aconfirmation table 242 in addition to a software module 178. The versioninformation registration part 131, the mailing part 132, the matchingproperty confirmation part 135 and the information uncasing part 136 ofthe system control part 100 have functions similar to those of theversion information registration part 231, the mailing part 232, thematching property confirmation part 235 and the information uncasingpart 236 of the information storage server 2 of the aforementionedembodiment respectively and perform similar processing. The same effectas the aforementioned embodiment can be attained also in this case.

Epitomizing the technical contents related to the present invention, anyof the substrate processing apparatus 1, the information storage server2 and the support computer 3 may perform each processing so far as thesame constructs the version management table 241 by storing the versioninformation of the software modules 178 presently installed in thesystem control part 100 and the unit control part 115 immediately afterinstallation when a software module 178 is installed in the systemcontrol part 100 or the unit control part 115 of the substrateprocessing apparatus 1 while confirming the matching properties betweenthe software modules 178 installed in the system control part 100 andthe unit control part 115 respectively from the version management table241 by referring to the confirmation table 242 registering the versioninformation of the software modules 178 having matching properties. Theperson in charge of the support center 5 receiving information of newversion registration through e-mail may alternatively confirm thematching properties.

While the substrate processing apparatus according to each of theaforementioned embodiments performs resist coating and development onsubstrates, the present invention is not restricted to this but thetechnique according to the present invention is applicable to anysubstrate processing apparatus such as a lamp annealing apparatusheating substrates by photo-irradiation, a cleaning apparatus performingcleaning of removing particles while rotating substrates, a dippingapparatus dipping substrates in a processing solution such ashydrofluoric acid for performing surface treatment or the like so far asthe same performs prescribed processing on substrates.

While the invention has been shown and described in detail, theforegoing description is in all aspects illustrative and notrestrictive. It is therefore understood that numerous modifications andvariations can be devised without departing from the scope of theinvention.

1. A substrate processing system comprising a substrate processingapparatus capable of making communication through a network, comprising:an additional information accumulator accumulating additionalinformation, relevant to said substrate processing apparatus,additionally distributed by a vendor of said substrate processingapparatus, said additional information includes countermeasureinformation against a failure of said substrate processing apparatus; awarning element generating a warning signal when said substrateprocessing apparatus causes said failure; a table storage elementstoring a table associating said warning signal with said countermeasureinformation against said failure resulting in said warning signal; anadditional information acquisition element acquiring said accumulatedadditional information through said network, wherein said additionalinformation acquisition element selectively acquires updatedcountermeasure information against said failure resulting in generatedsaid warning signal from said accumulated information in said additionalinformation accumulator; and an additional information storage elementstoring said additional information acquired by said additionalinformation acquisition element, and a date on which said additionalinformation is acquired.
 2. The substrate processing system according toclaim 1, further comprising a display element displaying saidcountermeasure information against said failure resulting in saidwarning signal when said warning signal is generated.
 3. A substrateprocessing apparatus capable of making communication through a network,comprising: a warning element generating a warning signal when saidsubstrate processing apparatus causes said failure; a table storageelement storing a table associating said warning signal with saidcountermeasure information against said failure resulting in saidwarning signal; an additional information acquisition element acquiringadditional information from an accumulator through said network, saidadditional information being relevant to said substrate processingapparatus and additionally distributed by a vendor of said substrateprocessing apparatus, wherein said additional information includescountermeasure information against a failure of said substrateprocessing apparatus and said additional information acquisition elementselectively acquires updated countermeasure information against saidfailure resulting in generated said warning signal from informationaccumulated in said accumulator; and an additional information storageelement storing said additional information acquired by said additionalinformation acquisition element, and a date on which said additionalinformation is acquired.
 4. The substrate processing apparatus accordingto claim 3, further comprising a display element displaying saidcountermeasure information against said failure resulting in saidwarning signal when said warning signal is generated.
 5. A method ofacquiring additional information relevant to a substrate processingapparatus in a system including a computer connected with said substrateprocessing apparatus through a network, comprising: an additionalinformation accumulating step performed in a predetermined operation ofsaid computer to accumulate said additional information, said additionalinformation includes countermeasure information against a failure ofsaid substrate processing apparatus; a warning step generating a warningsignal when said substrate processing apparatus causes said failure; anadditional information acquisition step of said substrate processingapparatus acquiring said additional information accumulated in saidcomputer through a said network; and an additional information storagestep of said substrate processing apparatus storing said acquiredadditional information in a predetermined storage element; and whereinsaid additional information acquisition step selectively acquiresupdated countermeasure information against said failure resulting insaid warning signal based on a table associating said warning signalwith said countermeasure information against said failure resulting insaid warning signal.
 6. A computer included in a substrate processingapparatus, said computer including a program of computer executableinstruction, wherein execution of said program by said computer enablessaid substrate processing apparatus to acquire additional information,relevant to said substrate processing apparatus, said additionalinformation includes countermeasure information against a failure ofsaid substrate processing apparatus, additionally distributed by avendor of said substrate processing apparatus, said program furtherenabling said substrate processing apparatus to generate a warningsignal when said substrate processing apparatus causes said failure,said program still further enabling said substrate processing apparatusto store said acquired additional information and a date on which saidadditional information is acquired, and enabling said substrateprocessing apparatus to selectively acquire updated countermeasureinformation against said failure resulting in said warning signal basedon a table associating said warning signal with said countermeasureinformation against said failure resulting in said warning signal.
 7. Acomputer-readable recording medium on which a program of instructionsfor a computer included in a substrate processing apparatus, whereinexecution of said program by said computer enables said substrateprocessing apparatus to acquire additional information, relevant to saidsubstrate processing apparatus, said additional information includescountermeasure information against a failure of said substrateprocessing apparatus, additionally distributed by a vendor of saidsubstrate processing apparatus, said program further enabling saidsubstrate processing apparatus to generate a warning signal when saidsubstrate processing apparatus causes said failure, said program stillfurther enabling said substrate processing apparatus to store saidacquired additional information and a date on which said additionalinformation is acquired, and enabling said substrate processingapparatus to selectively acquire updated countermeasure informationagainst said failure resulting in said warning signal based on a tableassociating said warning signal with said countermeasure informationagainst said failure resulting in said warning signal.
 8. A substrateprocessing system comprising: a substrate processing apparatusperforming prescribed processing on a substrate; and a computerconnected with said substrate processing apparatus through a network tobe capable of making communication; said computer comprising anadditional information accumulator accumulating additional information,relevant to said substrate processing apparatus and additionallydistributed by a vendor of said substrate processing apparatus, saidadditional information includes countermeasure information against afailure of said substrate processing apparatus, and said substrateprocessing apparatus comprising: a warning element generating a warningsignal when said substrate processing apparatus causes said failure; atable storage element storing a table associating said warning signalwith said countermeasure information against said failure resulting insaid warning signal, an additional information acquisition elementacquiring accumulated said additional information through said network,said additional information acquisition element selectively acquiresupdated countermeasure information against said failure resulting ingenerated said warning signal from accumulated information in saidadditional information accumulator; an additional information storageelement storing said additional information acquired by said additionalinformation acquisition element and a selection element selectingwhether or not to acquire said additional information through saidadditional information acquisition element.
 9. A substrate processingapparatus capable of making communication through a network, comprising:a warning element generating a warning signal when said substrateprocessing apparatus causes said failure; a table storage elementstoring a table associating said warning signal with said countermeasureinformation against said failure resulting in said warning signal, anadditional information acquisition element acquiring additionalinformation from an accumulator through said network, said additionalinformation being relevant to said substrate processing apparatus andadditionally distributed by a vendor of said substrate processingapparatus, said additional information includes countermeasureinformation against said failure of said substrate processing apparatus,said additional information acquisition element selectively acquiresupdated countermeasure information against said failure resulting ingenerated said warning signal from accumulated information in saidaccumulator; an additional information storage element storing saidadditional information acquired by said additional informationacquisition element; and a selection element selecting whether or not toacquire said additional information through said additional informationacquisition element.